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| CCD Alignment Inspection Exposure System |
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| Featrues： |
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| ◆Full set of CCD Alignment Inspection System from Japan, can inspect upper & lower artwork alignment fast and accurate. |
| ◆Professional motion track, to ensure the frame moves more rapidly and smoothly. |
| ◆Six-points type location framework, to ensure the alignment accuracy under ±12.5um. |
| ◆5KW and 8KW switch instantly, 5KW is suited for dry film and 8KW is suited for wet film. |
| ◆The whole machine is controlled by powerful industrial computer stably, big size touch color-display easy to operate. |
| ◆The lightproof protection on gateway of exposure chamber can be close automatically to prevent UV light leaking, well protect human operator. |
| ◆Double switches for exposure frame opening and closing to ensure the safe of human operator. |
| ◆Cooling is used by external ice-water directly for great saving energy, more stable and makes the system in high-performance. | |
| Specifications： |
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Panel Size |
305mm × 305mm ～ 558mm × 620mm |
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Thickness |
0.1 ～ 2 .0mm |
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Warp and Twist |
Max 5mm |
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Artwork Size |
610 × 660mm |
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Lamps |
2 × 8KW, uncollimated metal halide lamps.2 levels of power selectable, 5KW and 8KW. |
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Lamp Cooling method |
Indirect water cooling |
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Intensity |
5kw=20mw/cm2 8kw=45mw/cm2 @365nm |
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Uniformity |
﹥ 85% |
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Exposure control |
pper / Lower independent integrator sensor @365nm |
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Resolution line/space |
3 / 3mil |
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Exposure frames |
Double frames Glass vs. Glass, close and open by pneumatic. |
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Method of alignment |
2 × fixed hi-resolution CCD |
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Alignment accuracy |
± 12.5 um |
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Fixing of artwork |
Double grooves vacuum adsorption |
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Frame cooling |
Forced cold air |
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Power |
AC 380V 3 ￠ 50/60Hz 75A |
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ICE Water |
100L /min 7 ～ 11 ℃ |
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Air Source |
150 ～ 200L/min 6kg /cm2 | |
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